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FEI FIB201

MANUFACTURER FEI
MODEL FIB201
ACRONYM FIB

Interface Analysis Centre

AVAILABILITY 24/7
CONTACT 1 k.r.hallam@bristol.ac.uk
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SITE Main Campus

Description

High resolution micromachining, etching, deposition & microscopy, TEM sample preparation and sectioning, IC modification.

Specification

7nm resolution Platinum deposition Enhanced etch (iodine) Insulator enhanced etch (XeF2) Selective carbon mill (water)

Item ID #1845.

Last Updated: 18th March, 2014

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