|MODEL||IAC/Oxford; DC magnetron sputter chamber|
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Preparation of thin film samples. Chamber has four sputter guns for simultaneous deposition or sequential growth (heterostructures). Deuterium and oxygen reactive gas species are used for oxide and deuteride film synthesis. The system is equipped with several in-situ characterisation tools, including a quartz crystal balance, IGA and RHEED analysis.
Sample sizes of several mm square up to 25*25mm can be grown, in temperatures ranging from r.t. to 850C. Samples can also be prepared in oxygen or deuterium reactive gases.
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Last Updated: 18th March, 2014
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